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In the paper, the observable trends of the actual research and development of selected types of miniature and MEMS-type vacuum sensors are presented. Some information about the new types of active vacuum gauges, which are offered by the leading manufacturers of the vacuum measurement instruments, is given. Next, the list of MEMS devices that need vacuum for proper operation is presented. Some aspects...
Expanded polystyrene (EPS) particles were coated with copper by magnetron sputtering in order to produce a material suitable for electromagnetic interference (EMI) shielding. Field emission scanning electron microscopy (FE-SEM) and energy dispersive X-ray analysis (EDS) results demonstrated the effectiveness of successful copper deposition. The EMI shielding effectiveness (SE) of the Cu-coated EPS...
The rapid technical development enhances the demands on constructional materials in terms of their resistance to frictional wear, resistance to corrosion and erosion, high hardness, high tensile and fatigue strength. These demands can be satisfied by e.g. applying various surface engineering techniques that permit to modify the microstructure, phase and chemical composition of the surface layers of...
In order to clarify the effect of Al 2 O 3 particle size on the arc erosion behavior of the ceramic-reinforced Al 2 O 3 /Cu composite, Al 2 O 3 /Cu composites with different sizes of Al 2 O 3 particles were prepared by powder metallurgy, the effect of Al 2 O 3 particle size on the characteristics of arc motion was studied,...
The irradiation effect in Ni 3 N/Si bilayers induced by 100MeV Au ions at fluence 1.5×10 14 ions/cm 2 was investigated at room temperature. Grazing incidence X-ray diffraction determined the formation of Ni 2 Si and Si 3 N 4 phases at the interface. The roughness of the thin film was measured by atomic force microscopy. X-ray reflectivity was used to...
The nickel alloys of the Inconel type (containing above 15wt% of chromium), used in many industrial applications including the manufacture of aircraft, chemistry, power generation, and material processing, have advantageous mechanical properties, high plasticity and good corrosion resistance, but their frictional wear resistance is poor. This drawback can be obviated by subjecting the alloys to various...
A middle-frequency (MF) unbalanced magnetron sputtering system equipped with an electron source was designed and used for deposition of CrN thick films under various MF power (1.4–14kW) at fixed temperature, pressure, and gas flow rate. The deposition rate was increased with increasing MF power and the structure and N/Cr ratio of the deposited CrN films exhibited a complicated behavior, where the...
AlN/ZrB 2 multilayered coatings were synthesized in a magnetron sputtering system. The extensive measurements were employed to investigate the influence of different nanoscale modulation periods and modulation ratios on microstructure and mechanical properties of the coatings. Analysis of X-ray diffraction, profiler and nanoindention indicated that multilayered coatings possessed much higher...
Mg 2 Si layers were grown on Si substrates by thermal treatment of the substrates in a Mg vapor, and the growth condition dependence of the structural and electrical properties of the layers was investigated. The layers were grown by an interdiffusion process between the deposited Mg atoms and the substrates. The structural and electrical properties of the layers depend on the combinations...
In this study, boronizing of 99.9% pure nickel was performed by means of a powder-pack method using Commercial LSB-II powders (that contained SiC) at 850, 900 and 950°C for 2, 4, 6 and 8h, respectively. The coated samples were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) equipped with energy dispersive spectroscopy (EDS) and hardness tests. The presence of boride (Ni...
In an effort to increase the crystalline fraction of silicon films directly deposited on a glass substrate by hot-wire chemical vapor deposition, the effect of HCl addition was studied. The silicon film was deposited on a glass substrate at 320°C under a reactor pressure of 1333Pa at the wire temperature of 1600°C with 10%SiH 4 –90%He at a fixed flow rate 100 standard cubic centimeter per...
Transparent conducting aluminum-doped zinc oxide (ZnO:Al) films have been prepared on polycarbonate (PC) substrates by pulsed laser deposition technique at low substrate temperature (room-100°C); Nd-YAG laser with wavelength of 1064nm was used as laser source. The experiments were performed at various oxygen pressures (3pa, 5pa, and 7Pa). In order to study the influence of the process parameters on...
Siliconcarbonitride (Si–C–N) coatings were deposited on silicon (100) by magnetron sputtering using radio frequency alternating current and direct current. The mechanical performance of the coatings in the two modes was compared through static indentation and scratch test in both microlevel and nanolevel. A structure–property correlation was attempted to establish mechanical behavior, microstructure...
We have reported a study of a number of metal/p-type InP (Cu, Au, Al, Sn, Pb, Ti, Zn) Schottky barrier diodes (SBDs). Each one diode has been identically prepared on p-InP under vacuum conditions with metal deposition. In Schottky diodes, the current transport occurs by thermionic emission over the Schottky barrier. The current–voltage characteristics of Schottky contacts are described by two fitting...
The present paper reports the effect of substrate temperature on the structural, optical and electrical properties of vacuum deposited zinc telluride (ZnTe) thin films. X-ray diffraction (XRD) analysis of the films, deposited on glass substrates, revealed that they have cubic structure with strong (111) texture. Room temperature deposits are tellurium rich and an increase in the substrate temperature...
In this paper the effects of a strong magnetic field on plasma immersion ion implantation (PHI) of dielectric substrates were investigated. A plasma fluid model and finite difference schemes were used to simulate a one-dimensional system of plasma immersion ion implantation. The effect of secondary electron emission from the electrode on PHI was also taken into consideration. It was found that the...
Trilayers of Al/Fe/Al and Al/Fe multilayers produced by magnetron sputtering both with and without ion assistance have been depth profiled using Auger electron spectroscopy and medium energy ion scattering. Important differences are observed in the layer structure, with ion assisted deposition giving the narrowest Al/Fe interfaces and so maintaining the most clearly defined layer structure. Both types...
The characteristics of field electron emission (FE) from aligned carbon nanotubes (ACNTs) in a form of film, which were catalytically grown by plasma-enhanced hot filament chemical vapor deposition, were measured for many cycles. The results indicate that the FE characteristic for every measurement cycle is different and it follows the Fowler–Nordheim model in the low field region, but it deviates...
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